Products Applications

(1) Products Applications

With the unique and superior properties described above, columnar crystal silicon is widely used in various fields. Typical applications are the semiconductor fabrication equipment and liquid crystal displays.

Application Fields Equipment Instrument
Semi-Conductor
Production Process
Plasma Etching Equipment Ring
CVD Equipment Susceptor
Dummy Wafer
Annealing Furnace Diffusion Furnace others Plate to Homogenize the Heat Distribution
Liquid Crystal Production Process Sputtering Equipment Sputtering Target

(2) Comparison of Physical and Chemical Properties of Several Materials.

Contents Unit Si SiC* SiO2* Si3N4*
Columner Crystal Silicon Single Crystal Silicon Poly-Crystalline Slicon
Density g/c㎡ 2.33 2.33 2.33 3.1 2.2 3.2
Melting Point 1414 1414 1414 >2700 1550 1900
Boiling Point 2335 2335 2335 >2700)
(Decompo sition)
2950
Thermal Conductivity W/m・K 163 160 162 67 1.3 29.3
Coefficient of Thermal Expansion x10-6/K 3.34 3.34 3.33 4.3 0.5 3.1
Specific Heat J/K・g 0.73 0.74 0.72 0.2 0.7 0.71
Bending Strenght MPa 85.0 78.3 77.2 40.0 70.0 900.0
Young’s Modulus GPa 160 193 160 408 72 27
Refractive Index 3.35 3.35 3.35 2.654
Hardness 7 7 7 9.5 7
* by literatures