Columnar Crystal Silicon
Products Applications
(1) Products Applications
With the unique and superior properties described above, columnar crystal silicon is widely used in various fields. Typical applications are the semiconductor fabrication equipment and liquid crystal displays.
| Application Fields | Equipment | Instrument |
|---|---|---|
| Semi-Conductor Production Process | Plasma Etching Equipment | Ring |
| CVD Equipment | Susceptor | |
| Dummy Wafer | ||
| Annealing Furnace Diffusion Furnace others |
Plate to Homogenize the Heat Distribution |
|
| Liquid Crystal Production Process |
Sputtering Equipment | Sputtering Target |
(2) Comparison of Physical and Chemical Properties of Several Materials.
| Contents | Unit | Si | SiC* | SiO2* | Si3N4* | ||
|---|---|---|---|---|---|---|---|
| Columner Crystal Silicon |
Single Crystal Silicon |
Poly- Crystaline Slicon |
|||||
| Density | g/c㎡ | 2.33 | 2.33 | 2.33 | 3.1 | 2.2 | 3.2 |
| Melting Point | ℃ | 1414 | 1414 | 1414 | >2700 | 1550 | 1900 |
| Boiling Point | ℃ | 2335 | 2335 | 2335 | >2700) (Decompo sition) |
2950 | - |
| Thermal Conductivity | W/m･K | 163 | 160 | 162 | 67 | 1.3 | 29.3 |
| Coefficient of Thermal Expansion |
x10-6/K | 3.34 | 3.43 | 3.33 | 4.3 | 0.5 | 3.1 |
| Specific Heat | J/K･g | 0.73 | 0.74 | 0.72 | 0.2 | 0.7 | 0.71 |
| Bending Strenght | MPa | 85.0 | 78.3 | 77.2 | 40.0 | 70.0 | 900.0 |
| Young's Modulus | GPa | 160 | 193 | 160 | 408 | 72 | 27 |
| Refractive Index | - | 3.35 | 3.35 | 3.35 | 2.654 | - | - |
| Hardness | - | 7 | 7 | 7 | 9.5 | 7 | - |
* by literatures