Products Applications

(1) Products Applications

With the unique and superior properties described above, columnar crystal silicon is widely used in various fields. Typical applications are the semiconductor fabrication equipment and liquid crystal displays.

Application Fields	Equipment	Instrument
Semi-Conductor Production Process	Plasma Etching Equipment	Ring
	CVD Equipment	Susceptor
	CVD Equipment	Dummy Wafer
	Annealing Furnace Diffusion Furnace others	Plate to Homogenize the Heat Distribution
Liquid Crystal Production Process	Sputtering Equipment	Sputtering Target

(2) Comparison of Physical and Chemical Properties of Several Materials.

Contents	Unit	Si			SiC*	SiO₂*	Si₃N₄*
Contents	Unit	Columner Crystal Silicon	Single Crystal Silicon	Poly-Crystalline Slicon	SiC*	SiO₂*	Si₃N₄*
Density	g/c㎡	2.33	2.33	2.33	3.1	2.2	3.2
Melting Point	℃	1414	1414	1414	>2700	1550	1900
Boiling Point	℃	2335	2335	2335	>2700) (Decompo sition)	2950	–
Thermal Conductivity	W/m･K	163	160	162	67	1.3	29.3
Coefficient of Thermal Expansion	x10^-6/K	3.34	3.34	3.33	4.3	0.5	3.1
Specific Heat	J/K･g	0.73	0.74	0.72	0.2	0.7	0.71
Bending Strenght	MPa	85.0	78.3	77.2	40.0	70.0	900.0
Young’s Modulus	GPa	160	193	160	408	72	27
Refractive Index	–	3.35	3.35	3.35	2.654	–	–
Hardness	–	7	7	7	9.5	7	–

* by literatures