Thermal Properties

(1) Thermal Expansion Rate

Columnar crystal silicon also shows the same thermal expansion properties as single crystal silicon. When used as the silicon wafer susceptor, it suppresses the tendency of the wafer to slip due to the difference in thermal expansion rate between the wafer and the susceptor. Further, as columnar crystal silicon shows uniform thermal expansion not influenced by the cutting direction, it is possible to design components flexibly.

(2) Thermal Conductivityon

Columnar crystal silicon shows a homogeneous thermal conductivitye rate in all cutting directions. This is a unique property which cannot be obtained with single crystal silicon. Columnar crystal silicon is widely used as a plate to homogenize temperature distribution in annealing furnaces.